Dover (Westborough, MA) offers the Airglide LED Wafer System, now available in a wide base version for additional stiffness and support for larger payloads up to 50 kg, over travels up to 1 full meter. This positioning solution is designed for stepping or scanning applications, and is suitable for laser processing of LED or semiconductor wafers, as well as metrology or precision imaging systems applications. It can be set up as an individual precision axis, or stacked as an XY assembly. The system delivers straightness to ±0.5 μm, compensated accuracy to <1 μm, and bi-directional repeatability to ±0.4 μm. Depending upon the payload, it can accelerate at 5 m/s2, provide maximum velocity of 1000 mm/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 100 to 1,000 mm.

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