Sensortechnics (Walpole, MA) offers the LBA series of differential low-pressure sensors based on thermal mass flow measurement of air through a micro-flow channel integrated within the silicon sensor chip. The sensors are suitable for differential pressure flow measurement where the pressure drop across a flow element is a measure of the volumetric flow rate. For high performance medical respiratory devices it is useful for detecting very small flows around the zero flow point while being able to measure full scale flows of several hundreds of L/min. Special versions of the LBA sensors offer increased resolution of 0.01% in the lower pressure range and at the same time high dynamic ranges greater than 10,000. The sensors feature an MEMS construction that integrates the micro-flow channel and fully analog CMOS signal conditioning within the silicon sensor chip. They can be used with long connecting tubes and input filters without the need to recalibrate or correct the output signal.

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